XPS and AFM studies of surface chemistry and morphology of In2O3 ultrathin films deposited by rheotaxial growth and vacuum oxidation

Author	Kościelniak P.; Mazur J.; Henek J.; Kwoka M.; Pawela Ł.; Szuber J.
Title	XPS and AFM studies of surface chemistry and morphology of In2O3 ultrathin films deposited by rheotaxial growth and vacuum oxidation
Journal	Thin solid films
Year	2011
Status	Published
Volume	520
Pages	927–931